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Type Miller, M.K.; Russell, K.F.; Thompson, K.; Alvis, R.; Larson, D.J.
  Publication Review of Atom Probe FIB-Based Specimen Preparation Methods Volume Journal Article
Pages 2007
  Abstract Microscopy and Microanalysis  
  Corporate Author  
Publisher 13  
Editor 06
  Summary Language 428-436 Series Editor atom probe tomography, specimen preparation, focused ion beam  
Abbreviated Series Title Several FIB-based methods that have been developed to fabricate needle-shaped atom probe specimens from a variety of specimen geometries, and site-specific regions are reviewed. These methods have enabled electronic device structures to be characterized. The atom probe may be used to quantify the level and range of gallium implantation and has demonstrated that the use of low accelerating voltages during the final stages of milling can dramatically reduce the extent of gallium implantation.
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Medium
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no NU @ karnesky @ 10099
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