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Lee, J. H.; Kang, S. W.; Kim, S. G.; Song, Y. – H.; Cho, K. I.; Yoo, H. J.
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A new fabrication method of silicon field emitter array with local oxidation of polysilicon and chemical-mechanical-polishing
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Journal Article
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1996
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Int. Vac. Microelectron. Conf., 9th (1996), 415-418 Publisher: Nevskii Kur'er, St. Petersburg, Russia
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415-418
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2012
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