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	Record
	Type	Lee, R. A.; Patel, C.; Williams, H. A.; Cade, N. A.
	Publication	Semiconductor fabrication technology applied to micrometer valves	Volume	Journal Article
Pages	1989
	Abstract	IEEE Trans. Electr. Devices
	Corporate Author
Publisher	36
Editor
	Summary Language		Series Editor	Field Emission
Abbreviated Series Title
	Series Issue		ISSN
Medium
	Expedition		Notes
Call Number
Contribution Id
Serial		URL		ISBN
					no	4840
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